Automated Monitoring of Airborne Molecular Contamination (AMC)

CHROMATOTEC autoGC and autoGCMS solutions for AMC monitoring are higlhy modular and flexible solutions to match customer needs for a wide range of applications as :

• FOUP analysis with a focus on speciated VOCs and or total VOCs without matrix effect.
• Clean-room monitoring in fabrication plants: automated detection of AMC at multiple sampling points with an integrated multiplexing system of up to 48 streams, directly in the fab at variable locations and even at the tool-level.
• Monitoring of outside and intake air: automated fence line monitoring including alarm levels, up and downstream filter testing.

The custom-made analyzer is based on the most suitable CHROMATOTEC autoGC or autoGCMS instruments including embedded gas generators for cylinder free operation.

Embedded certified permeation tubes at low ppb or ppt level for automatic validation of the excellent performances inside cleanroom.

All VOCs compouinds can be produced in certified permeation tubes allowing to validate the unit on the more challenging compounds in any places ! The tunable sampling multiplexing solution decrease analysis costs per sampling point.

All these advantages are combined with the very unique performances given by the analytical gold standard method of autoGCMS systems :

• High accuracy of chromatography even at ppt of low ppb level
• Speed of mass spectrometry
• Ultra high sensitivity
• Utra high selectivity even for complex sample thanks to GC and MS combination even in 10 to 15 minutes !
• Automatic data processing
• Field unknown compound identification with onboard NIST library

The CHROMATOTEC autoGC and autoGCMS are the only rack mount autoGCMS able to meet the requirements of AMC monitoring of today and tommorrow. 

CHROMATOTEC autoGC and autoGCMS Features and Benefits

Best features:

Modular solution with additional module for up to more than 300 compounds analysed : Formaldehyde, mercaptans, OVOCs, NH3 etc.

• autoGCMS is a reference technology for VOCs monitoring allowing the more advanced compounds speciation
• Automatic alarm on concentrations and/or instrument check to alert immediately
• Very stable system over time with < 3% rsd on 10 ppb concentration during more than 4 months without calibration or tune !
• Fast autoGCMS cycle in few minutes per stream with high level of accuracy for targetted analysis of 10 to 30 VOCs or longer cycle time for more than 100 VOCs with same system
• LOQ Limit Of Quantification (automatically quantified by software) < 10 pptv
• System can be calibrated on one compound included in the system thanks to Flame Ionization Detector Relative Response Factors using the Effective Carbon Number Concept (autoGCMS have both detector FID and MS)
• High linear range of concentration from ppt to ppm in same analysis allowing to follow industrial accident or event
• Controled multiplexing system and data validation/calibration

Benefits:

• autoGCMS system already tested, approved and selected by several high level international institute such as : US EPA, MCERTs, TUV, CNRS, ACTRIS supersite and more
• Recommended standard compounds list with capability to update by operator inside clean room
• Full remote control capability
• No memory effect even between ppm and ppt level when switching sample stream : ideal for filtering monitoring and multiplexing
• On board zero gas and certified multi compounds permeation tubes to validate performance on regular basis. No need of any calibration cylinder or to move the system.
• Industrial integration via Modbus TCP
• Remote control and data reporting 
• Design and made to evolve with customer and market needs on the field
• Stand-alone system requiring only power supply
• Yearly preventive maintenance only including mass tuning check

Analysis of AMC contamination in FOUP – focus on VOC and condensables. Other analytical module can be added for more compouds
Typical relevant substances:

• Acetone
• IPA
• Toluene
• MEK
• PGME
• Alkanes
• Others

Fab clean-room monitoring

Automated monitoring of AMC at multiple sampling points. 

• Trimethylsilanol, HMDSO
• PGMEA, PGME
• Siloxanes
• Acetic Acid, Phenol
• Benzaldehyde
• Ethyl Acetate
• BTEX
• Alkanes and Alkenes
• Chloro-carbons
• Perfluoro-carbons
• S VOCs such as PAHs and linear alkanes up to C20 on same autoGC and up to C40 with additional autoGC module

Monitoring of outside air

Automated fence line monitoring incl. alarm levels.

Typical relevant substances:

• Aldehydes, Ketones, Glycolic compounds
• Pyrolysis Products from biomass burn
• VOC & Condensables (sticky compounds)
• Formaldehyde

Sulfur compounds

• H2S,
• Mercaptans
• Sulfides

Nitrogen containing compounds

• Amines
• Acetonitrile (biomass burning)
• NH3